Precision Ultraviolet Mirrors
Precision Ultraviolet Mirrors
Enh. DUV Coated
95
VUV Coated
90
85
DUV Coated
80
75
70
65
120 220 320 420 520 1020
Note: The soft coating can be easily damaged by fi ngerprints and aerosols.
Substrate: Fused Silica
Surface Quality: 20-10
Surface Flatness: l/10
Parallelism (arcmin): <3
Clear Aperture (%): 90
Diameter Tolerance (mm): +0,0/-0,2
Thickness Tolerance (mm): ±0,2
Angle of Incidence: 0°
• Flat and Focusing Mirrors Available
• Multilayer Coating on Super-Polished Substrates for High Refl ectance at 13,5 nm
• Narrow Pass Band Supports HHG Applications
Extreme Ultraviolet (EUV) Mirrors feature a multilayer Mo/Si coating which provides greater than 60%
refl ection at the design wavelength of 13,5 nm. The super-polished substrates, with a surface roughness of
less than 3 Å RMS, minimizes scatter. Flat Mirrors are available with angle of incidence (AOI) options of 45°
for steering S-Polarized beams, or 5° AOI for refl ecting unpolarized sources. They feature a 0,5 nm passband,
making them excellent harmonic selectors for High Harmonic Generation (HHG). Extreme Ultraviolet (EUV)
Spherical Mirrors are commonly used in Coherent Diff ractive Imaging (CDI) applications and materials science
research. Note: Test data from a sample from each mirror’s production run is included.
S PECI A L
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Precision
Flat Mirrors
Specialty
Flat Mirrors
Broadband
Laser MIrrors
Laser Line Mirrors Ultrafast Mirrors Mirror Substrates Float Glass Mirrors
Off-Axis
Focusing Mirrors
Focusing Mirrors
Surface Roughness (RMS Å): < 3
Surface Flatness: l/10
DWL (nm): 13,5
Diameter Tolerance (mm):
Flat: ±0,25
Spherical: +0,0/-0,13
Thickness Tolerance (mm):
Flat: ±0,508
Spherical: ±0,25
Extreme Ultraviolet (EUV) Mirrors
Extreme Ultraviolet (EUV) Mirrors
Type Diameter (mm) Thickness (mm) Substrate EFL (mm) Refl ectivity (%) AOI (°) Stock No. Price
Flat 25,4 6,35 Single Crystal Silicon N/A 60 5 #38-759 €2.316,00
Flat 25,4 6,35 Single Crystal Silicon N/A 65 45 #38-760 €2.316,00
Spherical 25,4 6,35 Fused Silica 250 60 5 #11-730 €3.580,15
Knife-Edge Pickoff Mirrors
Substrate: Fused Silica
Back Surface: Fine Grind
Diameter Tolerance (mm): +0,0/-0,2
Thickness Tolerance (mm): ±0,2
Surface Quality: 20-10
Surface Flatness: l/10
Parallelism (arcmin): 2
Coating: See page 88 for specifi cations
• Designed to Separate Two Beams Propagating Closely Next to Each Other
• 45° Bevel
• Coating Aperture Up to the Knife-Edge
• Enhanced Aluminum, Protected Gold and Protected Silver Coating Options
Knife-Edge Pickoff Mirrors are designed to selectively refl ect an individual beam from a group of tightly spaced
beams, while minimizing the overall footprint of the application. These mirrors feature a sharp 45° bevel with a
refl ective coating that extends to the beveled edge on a precision Fused Silica substrate with l/10 fl atness to the
bevel. Knife-Edge Pickoff Mirrors are ideal for applications that incorporate dispersion prisms and diff raction
gratings. These mirrors are available in three metallic coating options with performance from the visible spectrum
into the far IR.
TECHSPEC® Knife-Edge Pickoff Mirrors
Diameter
Thickness
(mm)
(mm)
Enhanced Aluminum Protected Gold Protected Silver
Stock No. Price Stock No. Price Stock No. Price
25,4 6,35 #36-135 €69,00 #36-136 €88,78 #36-137 €78,65
Refl ectivity: VUV Coated: Ravg >78% @ 120 - 125 nm
Ravg >85% @ 120 - 600 nm
DUV Coated: Ravg >88% @ 190 - 195 nm
Ravg >85% @ 200 - 600 nm
Enh, DUV Coated: Ravg ≥92% @ 190 - 250 nm
Ravg ≥83% @ 250 - 900 nm
• 120 nm and 190 nm Design Wavelengths
• Average Refl ectivity >85%
• Enhanced Metallic Coatings for Broadband
Refl ectivity through the Visible Region
TECHSPEC® Precision Ultraviolet Mirrors are ideal for
most commercially available light sources and are off ered
in Deep UV (DUV), Enhanced Deep UV (Enh. DUV),
and Vaccuum UV Enhanced (VUV) coating options. The
DUV coating off ers excellent refl ection from 190 nm to
the long-wave infrared (LWIR), while the VUV coating has
optimized refl ection from 120 nm to the LWIR.
TECHSPEC® Precision Ultraviolet Mirrors
Diameter
Thickness
Design
(mm)
(mm)
Wavelength
(nm)
Price – VUV Coated Design
Wavelength
(nm)
Price – DUV Coated Design
Wavelength
(nm)
Price – Enh. DUV Coated
Stock No. 1-5 6-25 26+ Stock No. 1-5 6-25 26+ Stock No. 1-5 6-25 26+
5,0 2,0 120 #18-725 €210,37 €165,01
Call For OEM Qty. Pricing
190 N/A – –
Call For OEM Qty. Pricing
190 #18-739 €231,60 €181,42
Call For OEM Qty. Pricing
10,0 2,0 120 #18-726 €220,98 €173,22 190 N/A – – 190 #18-740 €242,22 €189,62
12,5 6,0 120 #33-912 €226,78 €190,59 190 #48-567 €220,98 €183,83 190 #18-741 €242,22 €189,62
15,0 3,0 120 #18-727 €231,60 €191,07 190 N/A – – 190 #18-742 €242,22 €189,62
20,0 3,0 120 #18-728 €242,22 €189,62 190 N/A – – 190 #18-743 €263,44 €206,03
25,0 6,0 120 #33-913 €246,07 €215,19 190 #48-568 €242,22 €201,20 190 #18-744 €263,44 €206,03
30,0 5,0 120 #18-729 €250,90 €219,54 190 N/A – – 190 #18-745 €274,06 €214,23
35,0 5,0 120 #18-730 €252,83 €220,98 190 N/A – – 190 #18-746 €284,68 €222,91
40,0 5,0 120 #18-731 €263,44 €230,63 190 N/A – – 190 #18-747 €300,12 €234,98
50,0 10,0 120 #33-914 €318,45 €278,64 190 #48-569 €289,50 €240,77 190 #18-748 €337,75 €295,53
R (%)
620 720 820 920 (nm)
95
N
N
N
NN
N
NN
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