CaliBall™ – Interferometer Calibration Device
• Calibrate Transmission Spheres
• 1,3 nm RMS Finish
• Includes Kinematic Mount and Certificate of Compliance
The CaliBall™ is used to calibrate interferometer transmission spheres by using the Random Ball Test (RBT).
The Random Ball Test was used with some success in the past but the materials that the balls were made from
limited the measurement accuracy. The CaliBall™ has overcome the accuracy dilemma since it is made from
silicon nitride. The 25 mm balls are grade 5 (round to better than 125 nm), have a surface finish of ~1,3 nm
rms, are opaque and 11% reflective. Virtually indestructible, Caliball™ is a practical solution that can be used repeatedly
in a calibration environment for years without degradation. The CaliBall™ is supplied with a three ball
kinematic mount potted in a substantial steel base that is cut away on one side so f/0,7 transmission spheres
can be calibrated. The CaliBall™ with 4” Bayonet Mount is well-suited for horizontal interferometer setups and
does not require an additional x-y-z mounting configuration. Each CaliBall™ is shipped with a Certificate showing
roundness and finish, complete instructions for use and a clean room compatible storage case.
Nikon Interferometry Objectives
• Suitable for Non-Contact Optical Profiling
• Michelson and Mirau Objectives Available
• Infinity Corrected 200 mm Tube Lens Design
Interferometry objectives are used in non-contact optical profile measurement devices to obtain surface maps
and surface measurement parameters. They can be used to examine surface topography with very high precision
– to within a fraction of the wavelength of light. In these objectives, a light beam passes through a
beamsplitter, which directs the light to both the surface of the sample and a built-in reference mirror. The light
reflected from these surfaces recombines and a fringe interference pattern is formed. The Michelson objectives
provide comparatively longer working distances, wider fields of view and larger depth of field, whereas the
Mirau objectives are used in applications requiring higher magnification and/or numerical apertures. Use of
the Nikon 200 mm tube lens (#58-520) allows these objectives to be integrated to a C-Mount camera.
Nikon Interferometry Objectives
Michelson CF IC Epi Plan
TI 2,5X
Michelson CF IC
Epi Plan TI 5,0X
Mirau CF IC Epi Plan
DI 10X
Mirau CF IC Epi Plan
DI 20X
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• Precision N-BK7 Substrate
• Optimized for Use in Collimated Light with Small Fields of View
• Transmitted Wave Front Accurate to λ/16
Many optical systems experience some level of spherical aberrations which result in a loss of image quality
and overall system performance. Our line of TECHSPEC® Spherical Aberration Compensation Plates are
designed to compensate and correct known amounts of spherical aberration. The aberration plates should
be used in collimated space and placed near a pupil. They are excellent for correcting spherical aberrations
in systems that have small fields of view.
Spherical Aberration Compensation Plates can be combined to induce the desired amount of compensatory
spherical aberration. Negative sign plates create over corrected spherical aberration. Positive plates
create under corrected spherical aberration. Note: The arrow on the spherical aberration compensation
plates points in the direction of light travel.
Mirau CF IC Epi Plan
DI 50X
Mirau CF IC Epi Plan
I-DI 100X
Type: Michelson Michelson Mirau Mirau Mirau Mirau
Numerical Aperture: 0,075 0,13 0,30 0,40 0,55 0,70
Working Distance (mm): 10,3 9,3 7,4 4,7 3,4 2,0
Focal Length (mm): 80,0 40,0 20,0 10,0 4,0 2,0
Resolving Power (μm): 3,7 2,1 0,92 0,69 0,50 0,40
Depth of Focus (μm): 48,6 16,2 3,04 1,71 0,90 0,56
Field of Field (mm):
Eyepiece, 25 Dia. Field: - 5,0 2,5 1,25 0,50 0,25
Eyepiece, 20 Dia. Field: 8,0 4,0 2,0 1,0 0,40 0,20
⅔" Sensor (H x V): 3,52 x 2,64 1,76 x 1,32 0,88 x 0,66 0,44 x 0,33 0,18 x 0,13 0,011 x 0,08
½" Sensor (H x V): 2,56 x 1,92 1,28 x 0,96 0,64 x 0,48 0,32 x 0,24 0,13 x 0,10 0,08 x 0,06
Weight (g): 440 280 125 130 200 200
Stock No. #59-310 #59-311 #59-312 #59-313 #59-314 #62-788
Price €7.236,00 €3.771,00 €2.295,00 €2.547,00 €4.338,00 €10.305,00
Nikon 200 mm Tube Lens #58-520 €279,00
Nikon Tube Lens to C-Mount Holder #11-150 €184,00
Spherical Aberration Compensation Plates
TECHSPEC® Spherical Aberration Compensation Plates
Aberration
12,5 mm Diameter 25 mm Diameter
Stock No. Price Stock No. Price
+0,25λ #66-749 €388,89 #66-755 €506,63
-0,25λ #66-750 €388,89 #66-756 €506,63
+0,50λ #66-751 €388,89 #66-757 €506,63
-0,50λ #66-752 €388,89 #66-758 €506,63
+1,00λ #66-753 €388,89 #66-759 €506,63
-1,00λ #66-754 €388,89 #66-760 €506,63
Substrate: N-BK7
Dimensional Tolerance (mm): +0,00/-0,25
Thickness (mm):
12,5 mm Dia.: 3,00 ±0,20
25/50 mm Dia.: 4,00 ±0,20
Transmitted Wavefront Tolerance: ±l/16 @ 587 nm
Surface Quality: 60-40
Parallelism (arcmin): < 1
Clear Aperature: < 85
CaliBall™ – Interferometer Calibration Device
Description Stock No. Price
CaliBall Interferometer Calibration Device #59-495 €868,50
CaliBall Interferometer Calibration Device with Zygo 4" Bayonet Mount #19-418 €1.302,75
Ball Diameter: 25 mm
Substrate: Silicon Nitrate
Surface Finish: ~1,3 nm rms
N Reflectivity (VIS): 4%
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