CaliBall™ – Interferometer Calibration Device
• Calibrate Transmission Spheres
• 1.3nm RMS Finish
• Includes Kinematic Mount and Certifi cate of Compliance
The CaliBall™ is used to calibrate interferometer transmission spheres by using the Random Ball Test (RBT).
The Random Ball Test was used with some success in the past but the materials that the balls were made from
limited the measurement accuracy. The CaliBall™ has overcome the accuracy dilemma since it is made from
silicon nitride. The 25mm balls are grade 5 (round to better than 125nm), have a surface fi nish of ~1.3nm rms,
are opaque and 11% refl ective. Virtually indestructible, Caliball™ is a practical solution that can be used repeatedly
in a calibration environment for years without degradation.
The CaliBall™ is supplied with a three ball kinematic mount potted in a substantial steel base that is cut away
on one side so f/0.7 transmission spheres can be calibrated. The CaliBall™ is shipped with a Certifi cate showing
roundness and fi nish, complete instructions for use and a clean room compatible storage case.
Ball Diameter: 25mm
Surface Finish: ~ 1.3nm rms
Substrate: Silicon Nitrate
Refl ectivity (VIS): 4%
CaliBall™ – Interferometer Calibration Device
Description Stock No. Price
CaliBall™ Interferometer Calibration Device #59-495 £765.00
Nikon Interferometry Objectives
• Suitable for Non-Contact Optical Profi ling
• Michelson and Mirau Objectives Available
• Infi nity Corrected 200mm Tube Lens Design
Interferometry objectives are used in non-contact optical profi le measurement devices to obtain surface maps
and surface measurement parameters. They can be used to examine surface topography with very high precision
– to within a fraction of the wavelength of light. In these objectives, a light beam passes through a
beamsplitter, which directs the light to both the surface of the sample and a built-in reference mirror. The light
refl ected from these surfaces recombines and a fringe interference pattern is formed. The Michelson objectives
provide comparatively longer working distances, wider fi elds of view and larger depth of fi eld, whereas the
Mirau objectives are used in applications requiring higher magnifi cation and/or numerical apertures. Use of
the Nikon 200mm tube lens (#58-520) allows these objectives to be integrated to a C-Mount camera.
Nikon Interferometry Objectives
Michelson CF IC Epi Plan
TI 2.5X
Michelson CF IC
Epi Plan TI 5.0X
Mirau CF IC Epi Plan
DI 10X
Mirau CF IC Epi Plan
DI 20X
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optical metrology optical production spectroscopy detection laboratory kits
• Precision N-BK7 Substrate
• Optimized for Use in Collimated Light with Small Fields of View
• Transmitted Wave Front Accurate to l/16
Many optical systems experience some level of spherical aberrations which result in a loss of image quality
and overall system performance. Our line of TECHSPEC® Spherical Aberration Compensation Plates are
designed to compensate and correct known amounts of spherical aberration. The aberration plates should
be used in collimated space and placed near a pupil. They are excellent for correcting spherical aberrations
in systems that have small fi elds of view.
Spherical Aberration Compensation Plates can be combined to induce the desired amount of compensatory
spherical aberration. Negative sign plates create over corrected spherical aberration. Positive plates
create under corrected spherical aberration. Note: The arrow on the spherical aberration compensation
plates points in the direction of light travel.
Mirau CF IC Epi Plan
DI 50X
Mirau CF IC Epi Plan
I-DI 100X
Type: Michelson Michelson Mirau Mirau Mirau Mirau
Numerical Aperture: 0.075 0.13 0.30 0.40 0.55 0.70
Working Distance (mm): 10.3 9.3 7.4 4.7 3.4 2.0
Focal Length (mm): 80.0 40.0 20.0 10.0 4.0 2.0
Resolving Power (μm): 3.7 2.1 0.92 0.69 0.50 0.40
Depth of Field (μm): 48.6 16.2 3.04 1.71 0.90 0.56
Field of View (mm):
Eyepiece, 25 Dia. Field: 10.0 5.0 2.5 1.25 0.50 0.25
Eyepiece, 20 Dia. Field: 8.0 4.0 2.0 1.0 0.40 0.20
" Sensor (H x V): 3.52 x 2.64 1.76 x 1.32 0.88 x 0.66 0.44 x 0.33 0.18 x 0.13 0.011 x 0.08
½" Sensor (H x V): 2.56 x 1.92 1.28 x 0.96 0.64 x 0.48 0.32 x 0.24 0.13 x 0.10 0.08 x 0.06
Weight (g): 440 280 125 130 150 200
Stock No. #59-310 #59-311 #59-312 #59-313 #59-314 #62-788
Price £6,502.50 £3,391.50 £2,061.25 £2,286.50 £3,901.50 £9,265.00
Nikon 200mm Tube Lens #58-520 £250.75
Nikon Tube Lens to C-Mount Holder #11-150 £152.15
Spherical Aberration Compensation Plates
TECHSPEC® Spherical Aberration Compensation Plates
Aberration
12.5mm Diameter 25mm Diameter 50mm Diameter
Stock No. Price Stock No. Price Stock No. Price
+0.25l #66-749 £314.50 #66-755 £408.00 #66-761 £586.50
-0.25l #66-750 £314.50 #66-756 £408.00 #66-762 £586.50
+0.50l #66-751 £314.50 #66-757 £408.00 #66-763 £586.50
-0.50l #66-752 £314.50 #66-758 £408.00 #66-764 £586.50
+1.00l #66-753 £314.50 #66-759 £408.00 #66-765 £586.50
-1.00l #66-754 £314.50 #66-760 £408.00 #66-766 £586.50
Substrate: N-BK7
Dimensional Tolerance (mm): +0.00/-0.25
Thickness (mm):
12.5mm Dia.: 3.00 ±0.20
25/50mm Dia.: 4.00 ±0.20
Transmitted Wavefront Tolerance: ±l/16 @ 587nm
Surface Quality: 60-40
Parallelism (arcmin): <1
Clear Aperature: >85
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