Mitutoyo NIR, NUV, and UV Infinity Corrected Objectives
• Ideal for Bright Field Imaging in UV, Visible, and NIR Spectral Regions
• Excellent Performance at Nd:YAG Laser Lines
• Broad Spectral Ranges
Mitutoyo’s NIR, NUV, and UV infinity corrected long working distance objectives combine the benefits of the
standard M Plan Apo and M Plan Apo SL series objectives with enhanced spectral ranges. The NIR objectives
are corrected from 480 to 1800nm, making them ideal for semiconductor and telecommunication inspection,
or for laser cutting with common Nd:YAG lasers. The HR series offers an increased numerical aperture, providing
smaller spot sizes and higher resolution. The NUV and UV series of objectives have excellent performance
Spectral Transmission Characteristics
M Plan Apo NIR 100X
M Plan UV 80X
M Plan Apo NUV 100X
300 600 900 1200 1500 1800
Wavelength (nm)
M Plan NIR A B C D E F W.D.
5X 57.5 – 23.8 23.0 32.2 34.0 37.5
10X 64.5 1.0 25.2 24.8 32.2 34.0 30.5
20X 75.0 – – – 32.2 34.0 20.0
50X 78.0 – 24.4 24.0 32.2 34.0 17.0
100X 83.0 – 25.0 24.6 32.2 34.0 12.0
HR 50X 85.0 – – – 37.0 39.0 10.0
HR 100X 85.0 – 28.0 27.0 37.0 39.0 10.0
B 20X/50X 69.5 – – – 37.0 37.0 25.5
LCD 20X* 75.02 – – – 32.2 34.0 20.35
M Plan NUV A B C D E F W.D.
10X 64.5 – 25.2 24.8 32.2 34.0 30.0
20X 78.0 – – – 32.2 34.0 17.0
50X 80.0 – – – 32.2 34.0 15.0
100X 84.0 1.80 25.0 24.0 32.2 34.0 11.0
HR 50X 85.0 – – – 37.0 39.0 10.0
M Plan UV A B C D E F W.D.
10X 75.0 – – – 32.2 34.0 20.0
20X 80.0 – – – 32.2 34.0 15.0
50X 83.0 – – – 32.2 34.0 12.0
80X 85.0 – 22.7 – 32.2 34.0 10.0
Units: mm *LCD 20X parfocal length is 95.37
M Plan NIR HR and NIR B Series
• Improved Resolving Power Over Standard M Plan NIR Objectives
• Brightness is Increased 2.4X with NIR HR 50X, and 2.0X with NIR HR 100X
• NIR B Feature Improved Optical Transmission for Nd:YAG
Wavelengths 532nm and 1064nm and Longer Working Distances
at the doubled, tripled, and quadrupled Nd:YAG harmonics.
M26 x 0.706 (36 TPI)
Max. Dia. F
For compatible tube lenses, see page 293
WD
B
95
(Parfocal Distance)
5
A
M Plan Apo NIR Series
D C E
100
80
60
40
20
0
Spectral Transmission Factor (%)
• Long Working Distance for Bright Field Inspection
• Designed to be Color Corrected from 480nm to 1800nm &
Focused Within Focal Depth
• Ideal for Use in Laser Marking & Cutting Semiconductor Circuits
M Plan Apo NIR Series NIR HR Series NIR B Series
NIR 5X NIR 10X NIR 20X NIR LCD 20X NIR 50X NIR 100X NIR HR 50X NIR HR 100X NIR B 20X NIR B 50X
Numerical Aperture, NA: 0.14 0.26 0.40 0.40 0.42 0.50 0.65 0.70 0.40 0.42
Working Dist., WD (mm): 37.5 30.5 20.0 19.98 17.0 12.0 10.0 10.0 25.5 25.5
Focal Length (mm): 40.0 20.0 10.0 10.0 4.0 2.0 4.0 2.0 10.0 4.0
Resolution Power (μm): 2.0 1.1 0.7 0.7 0.7 0.6 0.42 0.39 0.7 0.7
Depth of Focus (μm): 14.0 4.1 1.7 1.7 1.6 1.1 0.65 0.56 1.7 1.6
Field of View: (mm):
Eyepiece, 24 Dia. Field: 4.8 2.4 1.2 1.2 0.48 0.24 0.48 0.24 1.2 0.48
Eyepiece, 18 Dia. Field: 3.6 1.8 0.9 0.9 0.36 0.18 0.36 0.18 0.9 0.36
⅔" Sensor Camera (H x V): 1.8 x 1.32 0.88 x 0.66 0.44 x 0.33 0.44 x 0.33 0.18 x 0.13 0.09 x 0.07 0.18 x 0.13 0.09 x 0.07 0.44 x 0.33 0.18 x 0.13
½" Sensor Camera (H x V): 1.28 x 0.96 0.64 x 0.48 0.32 x 0.24 0.32 x 0.24 0.13 x 0.10 0.06 x 0.05 0.13 x 0.10 0.06 x 0.05 0.32 x 0.24 0.13 x 0.10
Weight (g): 220 250 300 305 315 335 450 450 300 315
Stock No. #46-402 #46-403 #46-404 #37-550 #46-405 #46-406 #56-982 #56-983 #89-350 #89-351
Price £1,355.75 £1,542.75 £2,805.00 £3,880.25 £3,442.50 £4,675.00 £7,692.50 £9,265.00 £3,689.00 £4,866.25
M Plan Apo NUV/NUV HR Series M Plan UV Series
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• Corrected at 266nm and 550nm (Two-Wave Parfocal Design)
• Ideal for Bright Field Inspection, and 2nd and 4th Harmonic
Nd:YAG Laser Cutting
• Powerful When Used with Mitutoyo FS70L4 Microscope or
MT-L4 Tube Lens
• For Near UV to Visible Applications
• Designed to be Color Corrected from 355nm to 620nm &
Focused Within Focal Depth
• Compatible with MT-L Tube Lens
M Plan Apo NUV M Plan Apo UV Series
NUV 10X NUV 20X NUV 50X NUV 100X NUV HR 50X UV 10X UV 20X UV 50X UV 80X
Numerical Aperture, NA: 0.28 0.40 0.42 0.50 0.65 0.25 0.36 0.40 0.55
Working Dist., WD (mm): 30.5 17.0 15.0 11.0 10.0 20.0 15.0 12.0 10.0
Focal Length (mm): 20.0 10.0 4.0 2.0 4.0 20.0 10.0 4.0 2.5
Resolution Power (μm): 1.0 0.7 0.7 0.6 0.42 1.1 0.8 0.7 0.5
Depth of Focus (μm): 3.5 1.7 1.6 1.1 0.65 4.4 2.1 1.7 0.9
Field of View: (mm):
Eyepiece, 24 Dia. Field: 2.4 1.2 0.48 0.24 0.48 2.4 1.2 0.48 0.3
Eyepiece, 18 Dia. Field: 3.6 0.9 0.36 0.18 0.36 1.8 0.9 0.36 0.23
⅔" Sensor Camera (H x V): 0.88 x 0.66 0.44 x 0.33 0.18 x 0.13 0.09 x 0.07 0.18 x 0.13 0.88 x 0.66 0.44 x 0.33 0.18 x 0.13 0.11 x 0.08
½" Sensor Camera (H x V): 0.64 x 0.48 0.32 x 0.24 0.13 x 0.10 0.06 x 0.05 0.13 x 0.10 0.64 x 0.48 0.32 x 0.24 0.13 x 0.10 0.08 x 0.06
Weight (g): 255 340 350 380 500 310 330 400 380
Stock No. #86-176 #46-407 #46-408 #46-409 #86-177 #86-175 #56-320 #56-321 #56-322
Price £2,720.00 £5,546.25 £5,678.00 £7,140.00 £11,050.00 £10,285.00 £13,770.00 £14,025.00 £19,465.00
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