Reflectance
Extended Reflectance
• Flat and Focusing Mirrors Available
• Multilayer Coating on Super-Polished Substrates for High Refl ectance at 13,5 nm
• Narrow Pass Band Supports HHG Applications
Extreme Ultraviolet (EUV) Mirrors feature a multilayer Mo/Si coating which provides greater than 60%
refl ection at the design wavelength of 13,5 nm. The super-polished substrates, with a surface roughness of
less than 3 Å RMS, minimizes scatter. Flat Mirrors are available with angle of incidence (AOI) options of 45°
for steering S-Polarized beams, or 5° AOI for refl ecting unpolarized sources. They feature a 0,5 nm passband,
making them excellent harmonic selectors for High Harmonic Generation (HHG). Extreme Ultraviolet (EUV)
Spherical Mirrors are commonly used in Coherent Diff ractive Imaging (CDI) applications and materials science
research. Extreme Ultraviolet (EUV) Flat Mirrors Note: Test data from a sample from each mirror’s production
run is included.
• Designed to Separate Two Beams Propagating Closely Next to Each Other
• 45° Bevel
• Coating Aperture Up to the Knife-Edge
• Enhanced Aluminum, Protected Gold and Protected Silver Coating Options
Knife-Edge Pickoff Mirrors are designed to selectively refl ect an individual beam from a group of tightly spaced
beams, while minimizing the overall footprint of the application. These mirrors feature a sharp 45° bevel with a
refl ective coating that extends to the beveled edge on a precision Fused Silica substrate with λ/10 fl atness to the
bevel. Knife-Edge Pickoff Mirrors are ideal for applications that incorporate dispersion prisms and diff raction
gratings. These mirrors are available in three metallic coating options with performance from the visible spectrum
into the far IR.
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Precision
Flat Mirrors
Specialty
Flat Mirrors
Broadband
Laser MIrrors
Laser Line Mirrors Ultrafast Mirrors Mirror Substrates Float Glass Mirrors
Off-Axis
Focusing Mirrors
Focusing Mirrors
Precision Ultraviolet Mirrors
Knife-Edge Pickoff Mirrors
Substrate: Fused Silica
Surface Quality: 10-5
Surface Flatness: λ/10
Parallelism (arcmin): <3
Clear Aperture (%): 90
Diameter Tolerance (mm): +0,0/-0,2
Thickness Tolerance (mm): ±0,2
Refl ectivity: VUV Coated: Ravg >78% @ 120 - 125 nm
Ravg >85% @ 120 - 600 nm
DUV Coated: Ravg >88% @ 190 - 195 nm
Ravg >85% @ 200 - 600 nm
Back Surface: Ground
Angle of Incidence: 0°
95
VUV Coated DUV Coated
90
85
80
75
70
65
120 320 520 720 920 1120 1320 1520 1720 1920
R (%)
(nm)
95
DUV Coated VUV Coated
90
85
80
75
70
65
120 170 220 270 320 370 420 470 520 570 620
R (%)
(nm)
• 120 nm and 190 nm Design Wavelengths
• Average Refl ectivity >85% Across Specifi ed
Range
• Enhanced Metallic Coatings for Broadband
Refl ectivity through the Visible Region
TECHSPEC® Precision Ultraviolet Mirrors are ideal
for most commercially available light sources and
are off ered in both Deep UV (DUV) and Vacuum
UV Enhanced (VUV) coating options. The DUV
coating off ers excellent refl ection from 190 nm
to the long-wave infrared (LWIR), while the VUV
coating has optimized refl ection from 120 nm to
the LWIR. These TECHSPEC® Precision Ultraviolet
Mirrors are designed for 0° angle of incidence and
feature an aluminum-based coating for low polarization
sensitivity. Note: The soft coating can be
easily damaged by fi ngerprints and aerosols.
TECHSPEC® Precision Ultraviolet Mirrors
Diameter
Thickness
Design
(mm)
(mm)
Wavelength
(nm)
Price – VUV Coated Design
Wavelength
(nm)
Price – DUV Coated
Stock No. 1-5 6-25 26+ Stock No. 1-5 6-25 26+
12,5 6,0 120 #33-912 €220,00 €185,00
Call
190 #48-567 €210,00 €178,00
Call
25,0 6,0 120 #33-913 €240,00 €210,00 190 #48-568 €230,00 €195,00
50,0 10,0 120 #33-914 €310,00 €279,00 190 #48-569 €275,00 €233,00
S PECI A L
HANDLING
Surface Roughness (RMS Å): < 3
Surface Flatness: λ/10
DWL (nm): 13,5
Diameter Tolerance (mm):
Flat: ±0,25
Spherical: +0,0/-0,13
Thickness Tolerance (mm):
Flat: ±0,508
Spherical: ±0,25
Extreme Ultraviolet (EUV) Mirrors
Extreme Ultraviolet (EUV) Mirrors
Type Diameter (mm) Thickness (mm) Substrate EFL (mm) Refl ectivity (%) AOI (°) Stock No. Price
Flat 25,4 6,35 Single Crystal Silicon N/A 60 5 #38-759 €2.200,00
Flat 25,4 6,35 Single Crystal Silicon N/A 65 45 #38-760 €2.200,00
Spherical 25,4 6,35 Fused Silica 250 60 5 #11-730 €3.400,00
Substrate: Fused Silica
Back Surface: Fine Grind
Diameter Tolerance (mm): +0,0/-0,2
Thickness Tolerance (mm): ±0,2
Surface Quality: 20-10
Surface Flatness: λ/10
Parallelism (arcmin): 2
Coating: See page 88 for specifi cations
TECHSPEC® Knife-Edge Pickoff Mirrors
Diameter (mm) Thickness (mm)
Enhanced Aluminum Protected Gold Protected Silver
Stock No. Price Stock No. Price Stock No. Price
25,4 6,35 #36-135 €70,00 #36-136 €90,00 #36-137 €80,00
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