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ReflX™ Objectives
• Industry Leading 19 to 31 mm Working Distance
• EO Designed and Manufactured for Focusing or Imaging Applications
• Actively Aligned for Optimal Performance
Reflective objectives are commonly used in applications requiring superior image quality or focusing performance
over a broad spectral range. The Schwarzschild-style objectives exhibit near-diffraction limited performance
over the full reflecting range of the chosen coating. By eliminating the problems of chromatic aberration
and material absorption associated with standard microscope objectives, these components are ideal for
applications requiring high throughput and excellent resolution in the UV or IR, including FTIR spectroscopy,
ellipsometry, photolithography, and semiconductor inspection.
The ReflX™ objective design features a number of advantages over common Schwarzschild objectives. The
rugged design allows these objectives to be integrated into equipment with moderate heat and vibration without
sacrificing performance. All internal surfaces have been specially treated to eliminate stray light. Each objective is
manufactured in the U.S.A. and assembled, tested, and certified on our Zygo GPI-XP interferometer. A certificate
of compliance is included with each objective. For customized versions, including laser coatings and different
back tube lengths or for volume pricing, please contact our Sales Department.
RMS Ø46.10
WD 45.88 4.0
Units: mm
Infinite Finite Infinite/Finite Infinite Finite
10X 10X 15X 20X 20X
NA: 0,23 0,23 0,28 0,33 0,33
Working Distance (mm): 30,56 30,56 23,75 18,88 18,88
Focal Length (mm): 19,3 18,4 13,3 10,06 9,91
Transmitted Wavefront (RMS): l/10 l/10 l/10 l/10 l/10
Obscuration (%): 27 27 27 30,19 30,46
Mechanical Aperture Diameter (mm): 8,6 8,6 8,5 7,9 7,9
Entrance Pupil Diameter (mm): 8,5 8,5 7,4 7 7
Small Mirror Diameter (mm): 8,9 8,9 8,8 8,4 8,4
Mounting: RMS Thread RMS Thread RMS Thread RMS Thread RMS Thread
Field of View (mm): ⅔" Sensor (H x V): 0,88 x 0,66 0,88 x 0,66 0,59 x 0,44 0,44 x 0,33 0,44 x 0,33
½" Sensor (H x V): 0,64 x 0,48 0,64 x 0,48 0,43 x 0,32 0,32 x 0,24 0,32 x 0,24
TECHSPEC® ReflX™ Objectives
Description
DUV Enhanced Aluminum
(Ravg >83% @ 150 - 1000 nm,
Ravg >94% @ 1000 - 11000 nm)
UV Enhanced Aluminum
(Ravg >85% @ 200 - 700 nm, Ravg >76% @
700 - 1750 nm, Ravg >96% @ 1750 - 11000 nm)
Protected Gold
(Ravg >94% @ 700 - 800 nm,
Ravg >97% @ 800 - 2000 nm)
Ultrafast-Enhanced Silver
Ravg >99% @ 600 - 1000 nm, 0°
Rs >99% @ 540 - 1000 nm, 45°
Rp >98.5% @ 730 - 870 nm, 45°
GDD: 0 ±20fs2 @ 600 - 1050 nm
N
Stock No. Price 2-5 6+ Stock No. Price 2-5 6+ Stock No. Price 2-5 6+ Stock No. Price 2-5 6+
10X Infinite Conjugate #89-722 €1.476,00 €1.435,00
10X Finite Conjugate #89-723 €1.476,00 €1.435,00 #89-725 €1.476,00 €1.435,00 #89-727 €1.476,00 €1.435,00 #13-409 €1.558,00 €1.517,00
15X Infinite Conjugate #59-315 €1.640,00 €1.599,00 #58-417 €1.640,00 €1.599,00 #58-418 €1.640,00 €1.599,00 #13-410 €1.722,00 €1.681,00
15X Finite Conjugate #59-316 €1.640,00 €1.599,00 #58-421 €1.640,00 €1.599,00 #58-422 €1.640,00 €1.599,00 #13-411 €1.722,00 €1.681,00
20X Infinite Conjugate #39-141 €1.640,00 €1.599,00 #39-142 €1.640,00 €1.599,00 #39-143 €1.640,00 €1.599,00 #13-413 €1.722,00 €1.681,00
20X Finite Conjugate #39-145 €1.640,00 €1.599,00 #39-146 €1.640,00 €1.599,00 #39-147 €1.640,00 €1.599,00 #13-412 €1.722,00 €1.681,00
Call
#89-724 €1.476,00 €1.435,00
Call
#89-726 €1.476,00 €1.435,00
Call
#13-408 €1.558,00 €1.517,00
Call
High Performance ReflX™ Objectives
• Diffraction Limited Performance: Transmitted Wavefront of λ/14 RMS
• Streamlined Tapered Design for Added Clearance at 45° AOI
• Curved Spider Legs to Reduce Diffraction Effects
Our High Performance ReflX™ is built on the same design as our original ReflX™ (see above) with the added
benefits of a λ/4 peak-to-valley (P-V) transmitted wavefront and a tapered mechanical design, which permits
use at angles of incidence (AOI) up to 45°. Manufacturing reflective objectives that achieve λ/4 P-V transmitted
wavefront requires mirror surfaces to be highly accurate. Our precision manufacturing facilities employ a
QED Q22-MRF system and QED SSI Sub-Aperture Stitching Interferometer to polish and test our mirrors to
surface accuracies of better than λ/20 P-V.
Many applications that use reflective objectives require them aligned at angles of incidence up to 45°. To accommodate
these steep angles, the HP ReflX™ has a tapered design that provides > 6 mm clearance from the
object plane. To eliminate the diffraction effects in the image plane caused by straight-legged spider mounts, the
ReflX™ uses a curved leg design. All internal surfaces have been specially treated to eliminate stray light. Each
objective is manufactured in the U.S.A., and assembled, tested, and certified on our Zygo GPI-XP interferometer.
A certificate of compliance is included with each objective. For customized versions, including laser coatings
and different back tube lengths or for volume pricing, please contact our Sales Department.
Numerical Aperture, NA: 0,28
Working Distance, WD (mm): 23,75
Focal Length (mm): 13,3
Transmitted Wavefront, RMS: l/14
Obscuration (%): 27
Entrance Pupil (mm): 7,4
Mechanical Aperture Diameter (mm): 8,5
Small Mirror Diameter (mm): 8,8
Mounting: RMS Thread
Field of View (mm): ⅔" Sensor (H x V): 0,59 x 0,44
½" Sensor (H x V): 0,43 x 0,32
RMSØ46.10
23.75 45.88 4.0
Units: mm
TECHSPEC® High Performance ReflX™ Objectives
Description
DUV Enhanced Aluminum
(Ravg >83% @ 150 - 1000 nm,
Ravg >94% @ 1000 - 11000 nm)
Enhanced Aluminum
(Ravg >85% @ 200 - 700 nm, Ravg >76% @ 700 - 1750 nm, Ravg
>96% @ 1750 - 11000 nm)
Protected Gold
(Ravg >76% @ 700 - 1750 nm, Ravg >96% @ 1750 - 11000 nm)
Stock No. Price 2-5 6+ Stock No. Price 2-5 6+ Stock No. Price 2-5 6+
15X Infinite Conjugate #59-884 €1.792,00 €1.751,00
Call
#59-886 €1.792,00 €1.751,00
Call
#59-888 €1.792,00 €1.751,00
Call
15X Finite Conjugate #59-885 €1.792,00 €1.751,00 #59-887 €1.792,00 €1.751,00 #59-889 €1.792,00 €1.751,00
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