High Precision Compact Motorized Stages
• Closed Loop Design Provides High Repeatability and Accuracy
• Sub-Micron Resolution Translation
• Can Be Stacked Using Adapter Kit
High Precision Compact Motorized Stages utilize a closed loop design with a linear encoder to provide
highly repeatable, accurate translation. High Precision Compact Motorized Stages feature compact
forms to ease integration into space-sensitive applications, in addition to high load capacities. Additionally,
the adapter kit enables these translation stages to be stacked into X-Y, X-Z, and X-Y-Z configurations.
Note: Motorized stage controller is required for operation.
Piezo Linear Stage Dimensions Units: mm
23
Travel A B C D E F
16
12 20 15 1 2 6 16
26 40 35 3 6 10 36
50 80 75 7 14 18 36
Ø1.50 (x4) M2 (x2)
23
16
Ø1.50 (x4) M2 (x2)
Units: mm
23
16
Ø1.50 (x4) M2 (x2)
10 mm Travel #88-553
24
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• High Precision Piezo Stages
• Stick-Slip Designs
• Ultra-Fine Control
Piezo Positioning Stages utilize piezo-driven motors to achieve sub-micron resolution travel in applications
requiring fine positioning. Piezo Positioning Stages feature stick-slip designs that fully expand the piezo element
to drive the stage along its axis of travel without sacrificing precision or overall travel range, in addition
to embedded encoders to maintain repeatability. The linear positioning stages are capable of moving up to 2
mm per second with a total travel of over 51 mm. The rotary stage, which utilizes two pre-loaded steel ball
bearings, is capable of rotating at over 6° per second over an unlimited travel range and features high blocking
force. Note: Controller (#88-552) required for operation.
10.0
1.5
13.0
C x 10
10
15
5
5.25
A x M2 (xE)
A B
Ø1.50 (xD)
Ø2.20 (x4) 14
Ø2.20 Thru (x2)
R2x R1.10
12.7
20
35.41
F
10.0
1.5
10
15
13.0
5
5.25
A x M2 (xE)
Ø1.50 (xD)
Ø2.20 (x4) 14
Ø2.20 Thru (x2)
R2x R1.10
12.7
20
35.41
F
10.0
1.5
13.0
C x 10
10
15
5
5.25
A x M2 (xE)
A B
Ø1.50 (xD)
Ø2.20 (x4) 14
Ø2.20 Thru (x2)
R2x R1.10
12.7
20
35.41
F
Resolution: 0,5 μm (with micro-stepping)
Maximum Speed: 5 mm/s
Accuracy: 3 μm
Load Capacity (H or V): 1 kg
Bi-Directional Repeatability: ±1 μm
Uni-Directional Repeatability: 1 μm
Nominal Current: 240 mA
Weight: 100 g (10 mm)
120 g (26 mm)
High Precision Compact Motorized Stages
Description Stock No. Price
10 mm Travel Stage #88-553 €1.099,00
26 mm Travel Stage #88-554 €1.264,00
Motorized Stage Controller #88-555 €769,00
Accessories
Description Stock No. Price
X-Y-Axis Adapter Set #63-444 €114,00
X-Z-Axis Adapter Set #63-445 €150,00
Stage Table Adapter (1" Hole Spacing) #63-447 €114,00
3
7
15
2 x Ø1.5 3 d eep
M2.5 (x2) 3 deep
20.6 15.5
75
108.2
13
13
39
4.5
22
M2.5 (x8) x 5 deep
26
18.8 Max
35.2
46
M4 x 6.5 deep 4 x Ø1.5 x 3 deep
1.7 15
3.5
7.5
2 x Ø1.5
M2.5 (x2) 3 deep
20.615.5
37
70.2
13
22
35.2
M2.5 (x4) 4 deep
4.5
3.7 max
M4 6.5 deep
2 x Ø1.5
3 deep
26 mm Travel #88-554
Units: mm
Piezo Positioning Stages
Units: mm
Piezo Positioning Stages
Description: Linear Stages Rotary Stage
Travel: 12 mm 26 mm 50 mm Unlimited
Resolution (encoder): 0,5 μm 0,5 μm 0,5 μm 0,0022°
Bi-Directional Repeatability: ±1 μm ±1 μm ±1 μm ±0,0022°
Uni-Directional Repeatability: 1 μm 1 μm 1 μm 0,013°
Accuracy: 2 μm 3 μm 4 μm 0,01°
Velocity: 0,001 - 2 mm/s 0,001 - 2 mm/s 0,001 - 2 mm/s 0,001 - 6°/s
Eccentricity: – – – ±5 μm
Flatness: 1 μm 1,5 μm 2,5 μm –
Load Capacity: 2 kg 2 kg 2 kg 1 kg
Weight: 17 g 34 g 68 g 50 g
Dimensions: 20 x 35,5 x 13 mm 40 x 35,5 x 13 mm 80 x 35,5 x 13 mm 36,5 x 32 x 30,4 mm
Stock No./Price #88-548 €999,00 #88-549 €1.149,00 #88-550 €1.299,00 #88-551 €1.149,00
Piezo Stage Controller #88-552 €699,00
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